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Alternative Technologies to High-pressure Mercury Short Arc Lamps for Photolithography Applications

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Photolithography for the manufacture of liquid crystal displays (LCDs), semiconductors, and printed circuit boards (PCBs) is another major application for mercury lamps classified under item 4(f) in the exemption list of the RoHS Directive, in addition to curing, which was described in the previous post. Photolithography is a lithography process in which a substrate coated with resist is exposed to light or an electron beam to draw a designed circuit, and high-pressure mercury short arc lamps are mainly used as its light source. High-pressure mercury short arc lamps contai…


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